Author: Yuli Toshev

4M 20074M 2007 by Stefan DimovWolfgang  Menz Yuli  Toshev

With almost 100 papers and six keynote contributions, this volume details the state-of-the-art with regard to numerous aspects of advanced micro technologies with respect to metals, polymers, and ceramics, and the development of new production platforms for micro systems-based products.
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