The outstanding properties of ceramics have guaranteed their use for millennia and they remain vitally important in modern technology. This book provides an overview of the current status of processing of ceramic materials in micro technology. Emanating in part from scientific partners in the ceramics division of the 4M Network of Excellence, the book deals particularly with micro manufacturing and applications of ceramic materials.

The book covers the spectrum of topics from design, through material development and synthesis, to microforming, thermal processing and metrology strategies, including characterization, quality control and the dependence of properties upon processing and microstructure.

Processing technologies form a significant part of the book, and include replication techniques, tooling and mould fabrication and also special techniques such as embossing, electrophoretic deposition, high-pressure injection moulding and prototyping. Subtractive and additive process technologies are dealt with, before the book concludes with sections on quality assurance, metrology, and test equipment for micro components.

Foreword. Overview: Ceramics in micro technology: status, requirements, challenges. Modelling and Design: Design rules for microcomponents; Process simulation with particle methods: micro powder Injection moulding and hot embossing; Finite element modelling of the pressing of ceramic powders to predict the shape of a pellet after die compaction and sintering. Material Development for Micro Technology: Wet chemical synthesis for multinary oxide ceramics; Synthesis of nanoscaled powders for application in microsystem technology; Near net shaping of ceramics in microsystems technology; BST: A perovskite-type ferroelectric for tuneable dielectric applications at radio frequencies; Application of polymer-ceramic composites in microsystem technologies. Process Techniques - Replication: Micro moulds for injection moulding with ceramic feedstocks; High-pressure micro ceramic injection moulding; Low pressure injection moulding; Fabrication of ceramic micro components by electrophoretic deposition. Process Techniques - Thick film Technology: Tape casting in micro- and nanofabrication; LTCC-processing for microsystems application. Process Techniques - Ablating Techniques: Different ceramic materials for micro milling of high-aspect ratio micro structures; High precision micro grooving on ceramic substrates; Pattering and modification of ceramics and glass surfaces; Free form micro processing of ceramic materials by electro-discharge machining. Generating Techniques: Layer manufacturing of ceramic microcomponents; Micro direct writing of ceramics. Quality Assurance: Quality assurance and metrology

This is a wide-ranging and comprehensive volume which will be a vital state of the technology review for anyone with an interest in ceramics, particularly at the micro and nano scale. The book will be especially valuable for scientists and technologists in materials science and technology, process engineering, micro systems and nanotechnology generally. It will also provide an up-to-date synthesis for students in these and related disciplines.

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